Abstract

        In 2023, the sealing of key parts of ultra-high vacuum equipment in scientific research and semiconductor fields will face a series of challenges such as ultra-low leakage rate requirements, high temperature resistance, and low bolt pre tightening force. Shanggu's engineering team has broken through the use of aluminum alloy materials to manufacture blade spring reinforced metal C-rings. This type of product enables the commonly used stainless steel spring reinforced metal C-ring to achieve sufficient compression deformation under limited bolt locking force, and forms a true line seal through a unique blade structure, providing reliable sealing performance on the equipment.

        After a series of rigorous tests, the results showed that the sealing scheme not only achieved a sealing effect beyond expectations, but also ensured high reliability sealing.

Application Challenge

        Due to the requirements of high-purity sealing, chemical corrosion resistance, and ultra-low leakage rate, ensuring the long-term stability of sealing performance is crucial for the reliable operation of equipment. The sealing of key parts of ultra-high vacuum equipment in scientific research and semiconductor fields faces many challenges, including:
        ·Working temperature: The seal should be maintained in good condition within the temperature range of -270 ℃ to 300 ℃;

        ·Work pressure: Seals need to achieve effective sealing within the pressure range of ultra-high vacuum to atmospheric pressure;
        ·Sealing medium: Seals should have chemical corrosion resistance and be able to withstand special gas media;
        ·High purity sealing requirements: During long-term operation, the sealing components must not produce precipitates to avoid contamination of the vacuum environment;

        ·Ultra low leakage rate requirement: The leakage rate must be ensured to be below 1 × 10^-12 Pa · m3/s;

        ·Self regulating ability: The design of the spring can automatically compensate for sealing failure caused by material wear or temperature changes during use, maintaining a continuous sealing effect.
Application Effect

The sealing effect exceeded expectations 

        After testing, the application of Sonkit sealing solution reduced the leakage rate of the system to 1 × 10^-12 Pa · m ³/s, and no leakage was detected under ultra-high vacuum test pressure.

High reliability 

       Compared to other metal seals, the spring reinforced metal C-ring with an external opening on the blade only requires a lower bolt tightening load, so it can replace common non-metallic seals such as rubber. It has shown significant advantages in high temperature resistance, high pressure bearing, corrosion resistance, high-purity sealing, ultra-low leakage rate, etc., effectively ensuring the sealing performance and ensuring the safety and stability of scientific research/semiconductor equipment in use.

Solution - Product Display

About Sonkit
        Sonkit (Shanghai) Industrial Technology Co., Ltd. is a leading source factory for metal seals in China, focusing on the research and manufacturing of high-performance metal seal solutions. The company holds AS9100D, ISO 9001:2015, Nadcap, and D-U-N-S certifications, and has been awarded the titles of "High tech Enterprise" and "Specialized and Innovative Enterprise".

        Main products: A full range of metal seals including metal O-rings, C-rings, W-rings, U-rings, V-rings, and spring energy storage seals.
        Service areas: high-end manufacturing industries such as aerospace, oil and gas, nuclear power, semiconductors, and hydrogen energy, with products exported to multiple countries and regions around the world.
        Official website: www.sonkit.cn
        Address: Building 4 (D), No. 123 Xinjin Road, Qingpu District, Shanghai
        Phone: 15821628660
        Email: info@sonkit.cn